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Ultramet-L® 4581 Series Assembly (1.5 nm)

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Ultramet-L^® 4581 Series Assembly (1.5 nm)

Ultramet-L^® 4581 Series Assembly (1.5 nm)

The Ultramet-L^® 4581 Series Filter Assemblies are available with an all 316L stainless steel housing and 316L stainless steel filter. They are designed for ≥ 1.5 nanometer (0.0015 μm) filtration of semiconductor grade gases. The 4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel.

State-of-the-art 316L stainless steel or nickel media
Excellent particle removal efficiency vs. pressure drop
Accommodates extremely high flow rates for the assembly size
Excellent gas displacement and desorption characteristics
High temperature and pressure capabilities
Compact size for ease of installation
Wide variety of fitting options available
100% helium leak tested
Cleanroom manufactured and packaged
Housing material meets or exceeds VIM VAR specifications.

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Description

State-of-the-art 316L stainless steel or nickel media
Excellent particle removal efficiency vs. pressure drop
Accommodates extremely high flow rates for the assembly size
Excellent gas displacement and desorption characteristics
High temperature and pressure capabilities
Compact size for ease of installation
Wide variety of fitting options available
100% helium leak tested
Cleanroom manufactured and packaged
Housing material meets or exceeds VIM VAR specifications.

Specifications


Filter Medium	316L stainless steel or nickel
Internal Surface Finish	10 μin / 0.25 μm R_a
Housing	Electropolished 316L stainless steel Housing material meets or exceeds typical VIM VAR specifications
Removal Rating	≥ 1.5 nm
Particle Removal Characteristics	10⁹ particle reduction up to 50 slpm / 1.76 scfm
Connections	1⁄4" Gasket Seal, male (VCR² or compatible)
Leak Rating	100% helium leak tested to 10^-9 atm•cm³/sec
Leak Rating	Design validated to 10^-11 atm•cm³/sec
Maximum Operating Pressure	3,000 psig @ 100 °F / 207 bar @ 38 °C; 1,685 psig @ 840 °F / 116 bar @ 450 °C
Maximum Allowable Differential Pressure	125 psid @ 100 °F / 8.6 bar @ 38 °C; 60 psid @ 840 °F / 4.1 bar @ 450 °C
EU pressure equipment directive	Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU