Ultramet-L® 4581 Series Assembly (1.5 nm) product photo Primary L

Ultramet-L® 4581 Series Assembly (1.5 nm)

The Ultramet-L® 4581 Series Filter Assemblies (1.5 nm) are available with an all 316L stainless steel housing and 316L stainless steel filter. They are designed for ≥ 1.5 nanometer (0.0015 μm) filtration of semiconductor grade gases. The 4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel.

  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • Housing material meets or exceeds VIM VAR specifications.


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Datasheets

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The Ultramet-L® 4581 Series Filter Assemblies (1.5 nm) are available with an all 316L stainless steel housing and 316L stainless steel filter. They are designed for ≥ 1.5 nanometer (0.0015 μm) filtration of semiconductor grade gases. The 4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel.

  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • Housing material meets or exceeds VIM VAR specifications.
Filter Medium 316L stainless steel
Internal Surface Finish 10 μin / 0.25 μm Ra
Housing Electropolished 316L stainless steel
Housing material meets or exceeds typical VIM VAR specifications
Removal Rating ≥ 1.5 nm
Particle Removal Characteristics 109 particle reduction up to 50 slpm / 1.76 scfm
Connections 1⁄4" Gasket Seal, male (VCR2 or compatible)
Leak Rating 100% helium leak tested to 10-9 atm•cm3/sec
Design validated to 10-11 atm•cm3/sec
Maximum Operating Pressure 3,000 psig @ 100 °F / 207 bar @ 38 °C; 1,685 psig @ 840 °F / 116 bar @ 450 °C
Maximum Allowable Differential Pressure 125 psid @ 100 °F / 8.6 bar @ 38 °C; 60 psid @ 840 °F / 4.1 bar @ 450 °C
EU pressure equipment directive Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

Referenced at most penetrating particle size.

VCR is a trademark of Swagelok Co.

Pressure Drop vs. Gas Flow Rate

Assemblies
Filtration
Part Number Description Fitting Type
GLFF4581VMM4 All Stainless Steel 1⁄4" Gasket Seal (VCR or Compatible) Male / Malee

Unit conversion: 1 kilogram per square centimeter = 98.067 kilopascals

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