Gasket-Sert™ Filter product photo Primary L

Gasket-Sert™ Filter

The Gasket-Sert filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
  • True in-line design and easy installation
  • Fits in place of standard .25 in. VCR Gasket
  • Available in 316L or Hastelloy C-22
  • Gasket material Nickel 200
  • Broad compatibility with process gases
  • Low differential pressure
  • All metal construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs


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Description
The Gasket-Sert filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
  • True in-line design and easy installation
  • Fits in place of standard .25 in. VCR Gasket
  • Available in 316L or Hastelloy C-22
  • Gasket material Nickel 200
  • Broad compatibility with process gases
  • Low differential pressure
  • All metal construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs
Specifications

Materials

  • Medium: 316L or Hastelloy C-22
  • Gasket: Nickel 200

Removal Rating

  • ≥ 0.4 μm

Operating Conditions

  • Recommended Flow Range: 0-10 SCFM/0-280 slpm
  • Maximum Operating Temperature:
    • Non-Corrosive Gases: 840 °F / 450 °C
    • Corrosive Gases: 70 °F / 21 °C
  • Maximum Differential Pressure:
    • 400 psid @ 840 °F / 27 bar @ 450 °C
    • 750 psid @ 100 °F / 52 bar @ 38 °C
Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate
Type
Assemblies
Use
Filtration
Ordering Information
Part Number Material of Construction Fitting Type
CNL3004VNG4 316L Stainless Steel Media, Nickel 200 Gasket 14 in. VCR
CNC3004VNG4 Hastelloy C-22 Media, Nickel 200 Gasket 14 in. VCR

Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration