Gasket-Sert™ PSP Filter 1 1/8'' W-seal product photo Primary L

Gasket-Sert™ PSP Filter 1 1/8'' W-seal

The Gasket-Sert PSP W-seal filter is designed to protect major components of gas panels in semiconductor gas
distribution systems. The W-seal gasket is easy to install into any system that uses W-seal-type components.

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)

Feature Benefit Value
Welded to W-seal gasket Filter can replace any W-seal gasket Lower installation
cost
Contains alignment retainer Easy installation into system with
minimal operator handling
Lower labor cost
All stainless steel
construction
Broad compatibility with semiconductor
process gases
Long service life
No housing required No hold-up volume and zero gas
displacement
Faster start-up time
Cleanroom packaged High level of cleanliness Faster start-up time
0.4 μm particle removal
rating
Filter protects critical components such
as regulators and MFCs
Lower cost of
ownership
Low differential pressure High flow rates with minimal flow
restriction
Long service life



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Description
The Gasket-Sert PSP W-seal filter is designed to protect major components of gas panels in semiconductor gas
distribution systems. The W-seal gasket is easy to install into any system that uses W-seal-type components.

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)

Feature Benefit Value
Welded to W-seal gasket Filter can replace any W-seal gasket Lower installation
cost
Contains alignment retainer Easy installation into system with
minimal operator handling
Lower labor cost
All stainless steel
construction
Broad compatibility with semiconductor
process gases
Long service life
No housing required No hold-up volume and zero gas
displacement
Faster start-up time
Cleanroom packaged High level of cleanliness Faster start-up time
0.4 μm particle removal
rating
Filter protects critical components such
as regulators and MFCs
Lower cost of
ownership
Low differential pressure High flow rates with minimal flow
restriction
Long service life

Specifications

Wetted Materials

  • Medium: 316L stainless steel (filter and gasket)

Removal Rating1

  • ≥ 0.4 μm at 99.9% efficiency

Operating Conditions

  • Maximum operating temperature Inert gases: 300 ˚C / 572 ˚F Anhydrous corrosive gases: 30 ˚C / 86 ˚F
  • Maximum differential pressure Inside out: 0.7 MPa at 38 ˚C / 100 psid at 100 ˚F Outside in: 1.4 MPa at 38 ˚C / 200 psid at 100 ˚F
1 Particle rating is based on laboratory testing with NaCl aerosol.
Performance

Pressure Drop vs. Gas Flow Rate

W-seal Gasket-Sert PSP Filter
Type
Cartridges and Elements
Use
Filtration
Ordering Information
Part Number Wetted Materials of Construction Fitting Type
CNF1104UPSG2 All 316L stainless steel 118 in. W-seal gasket

Unit conversion: 100 kilopascals = 1 bar
Application
Process gas filtration