Gasket-Sert™ PSP Filter product photo Primary L

Gasket-Sert™ PSP Filter

The Gasket-Sert PSP filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
  • True in-line design and easy installation
  • Alignment retainer for ease of installation
  • Fits in place of standard 14 in. VCR1 or 14 in. UJR compatible gasket
  • Broad compatibility with process gases
  • Low differential pressure
  • All 316L stainless steel construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No hold-up volume
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs
1 VCR is a trademark of Swagelok Co.


* Required
Need Help?
Download Datasheet
Description
The Gasket-Sert PSP filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
  • True in-line design and easy installation
  • Alignment retainer for ease of installation
  • Fits in place of standard 14 in. VCR1 or 14 in. UJR compatible gasket
  • Broad compatibility with process gases
  • Low differential pressure
  • All 316L stainless steel construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No hold-up volume
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs
1 VCR is a trademark of Swagelok Co.
Specifications

Materials

  • Medium and gasket: 316L stainless steel

Removal Rating

  • ≥ 0.4 μm at 99.9% efficiency

Operating Conditions

  • Recommended flow range: 0-28 slpm / 0-1 scfm
  • Maximum operating temperature:
    • Inert gases: 300 °C / 572 °F
    • Anhydrous corrosive gases: 30 °C / 86 °F
  • Maximum differential pressure:
    • Inside out:
      690 kPa @ 20 °C / 100 psid @ 68 °F
    • Outside in:
      1380 kPa @ 20 °C / 200 psid @ 68 °F
Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate
Type
Cartridges and Elements
Use
Filtration
Ordering Information
Part Number Material of Construction Fitting Type
CNF1104USG4 All 316L stainless steel 14 in. VCR or 14 in. UJR

Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration, Process gas filtration
Segment
Photovoltaics
Semiconductor