Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.
- 316L stainless steel housing
- State-of-the-art nickel filter medium
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
- No downstream welds
- Minimum downstream volume
Products in this datasheet may be covered by one or more patents, including US 1,105,201.