Mini Ultramet-L® 1100 Series Assembly product photo Primary L

Mini Ultramet-L® 1100 Series Assembly

The Mini Ultramet-L®1100 Series assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor grade gases, and is ideally suited for point-of-use applications. The 1100 Series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel.
  • One circumferential weld in entire product
  • State-of-the-art 316L stainless steel or nickel medium
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size
  • 100% helium leak tested
  • Cleanroom manufactured and packaged


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Description
The Mini Ultramet-L®1100 Series assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor grade gases, and is ideally suited for point-of-use applications. The 1100 Series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel.
  • One circumferential weld in entire product
  • State-of-the-art 316L stainless steel or nickel medium
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
Specifications

Materials

  • Electropolished 316L stainless steel housing
  • Housing material meets or exceeds VIM/VAR specifications
  • EU Pressure Equipment Directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
  • ≤ 0.13 μm / 5 μin Ra internal surface finish
  • Cr:Fe (1:1) chromium-enriched internal housing surface chemistry
  • 316L stainless steel or nickel filter medium

Removal Rating

  • ≥ 3 nm

Preconditioned Options
1102 Series

  • < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD.)
  • < 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD.)
  • < 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD.)
  • No particle contribution above background ≤ 1 particle / m3 or ft3

Connections

  • 14 in. gasket seal (VCR1 or compatible)
  • 14 in. butt weld (0.89 mm / 0.035 in. wall)

Operating Conditions

  • Maximum operating pressure:
    • 20.7 MPa @ 38 °C / 3,000 psig @ 100 °F
    • 11.6 MPa @ 450 °C / 1,685 psig @ 840 °F
  • Maximum allowable differential pressure:

    316L stainless steel filter:
    • 0.86 MPa @ 38 °C / 125 psid @ 100 °F
    • 0.41 MPa @ 450 °C / 60 psid @ 840 °F
    Nickel filter:
    • 0.69 MPa @ 38 °C / 100 psid @ 100 °F
    • 0.41 MPa @ 450 °C / 60 psid @ 840 °F

Particle Removal Characteristics

  • 109 particle reduction up to 15 slpm

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s
1VCR is a trademark of Swagelok Company.
Performance

Pressure Drop vs. Gas Flow Rate

316L Stainless Steel Filter Assembly

316L Stainless Steel Filter Assembly

Nickel Filter Assembly

Nickel Filter Assembly
Type
Assemblies
Use
Filtration
Ordering Information
Part Number Description Fitting Type Length (L)
(mm / in.)
Preconditioned
GLFF1100VMM4 All 316L stainless steel 14 in. gasket seal (VCR or compatible) male / male 84 / 3.31 No
GLFF1100VMM4BJ All 316L stainless steel 14 in gasket seal (VCR or compatible) male / male 84 / 3.31 No
GLFF1100VFM4 All 316L stainless steel 14 in. gasket seal (VCR or compatible) female inlet / male outlet 88 / 3.47 No
GLFF1100BW4 All 316L stainless steel 14 in. butt weld, 0.89 mm / 0.035 in wall 42.5 / 1.75 No
GLFF1102VMM4 All 316L stainless steel 14 in. gasket seal (VCR or compatible) male / male 84 / 3.31 Yes
GLFN1100VMM4 Nickel media, 316L stainless steel housing 14 in. gasket seal (VCR or compatible) male / male 84 / 3.31 No
GLFN1100VMF4 Nickel media, 316L stainless steel housing 14 in. gasket seal (VCR or compatible) male inlet / female outlet 71.1 / 2.80 No
GLFN1100BW4 Nickel media, 316L stainless steel housing 14 in. butt weld, 0.89 mm / 0.035 in. wall 42.5 / 1.75 No
GLFN1102VMM4 Nickel media, 316L stainless steel housing 14 in. gasket seal (VCR or compatible) male / male 84 / 3.31 Yes

Unit conversion: 100 kilopascals = 1 bar
Application
Process gas filtration