Ultramet-L® 4000 Series Filter Assembly product photo Primary L

Ultramet-L® 4000 Series Filter Assembly

The Ultramet-L® 4000 Series Filter Assembly is a unique, all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • VAR PLUS housing material meets or exceeds VIM VAR specifications


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Description
The Ultramet-L® 4000 Series Filter Assembly is a unique, all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • VAR PLUS housing material meets or exceeds VIM VAR specifications
Specifications
 

Materials

  • Electropolished 316L stainless steel housing
  • ≤ 7 μin / 0.18 μm Ra internal surface finish
  • Cr:Fe (1:1) Chromium enriched internal surface chemistry
  • Housing material meets or exceeds VIM/VAR specifications
  • 316L stainless steel filter media

Removal Rating

  • ≥ 0.003 μm

Connections

  • 14 in., 12 in. Gasket Seal, Male/Male (VCR1 or compatible)
  • 14 in. Compression Seal, Male/Male (Swagelok1 or compatible)
  • 14 in. Butt Weld (0.035 in. / 0.89 mm wall)

Operating Conditions

  • Maximum Operating Pressure:
    • 3000 psig @ 100 °F / 207 bar @ 38 °C
    • 1685 psig @ 840 °F / 116 bar @ 450 °C
  • Maximum Allowable Differential Pressure:
    • 125 psid @ 100 °F / 8.6 bar @ 38 °C
    • 60 psid @ 840 °F / 4.1 bar @ 450 °C

Particle Removal Characteristics

  • 109 particle reduction up to 6 slpm / 0.2 scfm
  • 104 particle reduction up to 75 slpm / 2.6 scfm

Leak Rating

  • 100% helium leak tested to 10-9 atm•cc/s
  • Design validated to 10-11 atm•cm3/s
1VCR and Swagelok are trademarks of Swagelok Co.
Performance
 

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate
Type
Assemblies
Use
Filtration
Ordering Information
Part Number Description Length (L)
(in. / mm)
GLFF4000VM4 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 (L1)
GLFF4000SM4 14 in. Compression Seal (Swagelok or Compatible) Male/Male 2.88 / 73 (L1)
GLFF4000BW4 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 1.75 / 45 (L2)
GLFF4000VMM8 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.35 / 85 (L1)

Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration