Ultramet-L® 4281, 4581 Series Assembly product photo Primary L

Ultramet-L® 4281, 4581 Series Assembly

The Ultramet-L® 4281/4581 Series Filter Assemblies are available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. They are designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor grade gases. The 4281/4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.
  • State-of-the-art 316L stainless steel or nickel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • Housing material meets or exceeds VIM VAR specifications.


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Description
The Ultramet-L® 4281/4581 Series Filter Assemblies are available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. They are designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor grade gases. The 4281/4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.
  • State-of-the-art 316L stainless steel or nickel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • Housing material meets or exceeds VIM VAR specifications.
Specifications

Materials

  • Electropolished 316L stainless steel housing
  • 10 μin / 0.25 μm Ra internal surface finish
  • Housing material meets or exceeds typical VIM VAR specifications
  • 316L stainless steel or nickel filter media

Removal Rating

  • ≥ 0.003 μm

Connections

  • 14 in. Gasket Seal, male (VCR1 or compatible)
  • Other fitting configurations available, please contact Pall

Operating Conditions

  • Maximum Operating Pressure:
    • 3,000 psig @ 100 °F / 207 bar @ 38 °C
    • 1,685 psig @ 840 °F / 116 bar @ 450 °C
  • Maximum Allowable Differential Pressure:
    • 125 psid @ 100 °F / 8.6 bar @ 38 °C
    • 60 psid @ 840 °F / 4.1 bar @ 450 °C
  • EU Pressure Equipment Directive: Assemblies have been evaluated and are CE marked per the European Union's Pressure Equipment Directive 97/23/EC

Particle Removal Characteristics

  • 4281 series:
    • 109 particle reduction up to 6 slpm / 0.2 scfm
    • 104 particle reduction up to 75 slpm / 2.6 scfm
  • 4581 series: 109 particle reduction up to 50 slpm / 1.76 scfm

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/sec
  • Design validated to 10-11 atm•cm3/sec
1VCR is a trademark of Swagelok Co.
Performance

Pressure Drop vs. Gas Flow Rate

GLFF4281VMM4

GLFF4281VMM4

GLFF4581VMM4

GLFF4581VMM4

GLFN4581VMM4

GLFN4581VMM4
Type
Assemblies
Use
Filtration
Ordering Information
Part Number Description Fitting Type
GLFF4281VMM4 All Stainless Steel 14 in. Gasket Seal (VCR or Compatible)
Male / Male
GLFF4581VMM4 All Stainless Steel 14 in. Gasket Seal (VCR or Compatible)
Male / Male
GLFN4581VMM4 Nickel Media, 316L Stainless Steel Housing 14 in. Gasket Seal (VCR or Compatible)
Male / Male

Unit conversion: 1 kilogram per square centimeter = 98.067 kilopascals
Application
Process gas filtration