Ultramet-L® 5500 Series Filter Assembly product photo Primary L

Ultramet-L® 5500 Series Filter Assembly

The Ultramet-L® 5500 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency versus pressure drop
  • Excellent gas displacement and desorption characteristics
  • High temperature capabilities
  • Compact size
  • 100% helium leak tested
  • Clean room manufactured and packaged
  • Available preconditioned
  • CE marked in accordance with PED 97/23/EC


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Description
The Ultramet-L® 5500 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency versus pressure drop
  • Excellent gas displacement and desorption characteristics
  • High temperature capabilities
  • Compact size
  • 100% helium leak tested
  • Clean room manufactured and packaged
  • Available preconditioned
  • CE marked in accordance with PED 97/23/EC
Specifications

Materials

  • Electropolished 316L stainless steel housing
  • 10 μin / 0.25 μm Ra internal surface finish
  • Cr:Fe (1:1) internal housing surface chemistry
  • 316L stainless steel filter media*
  • Housing material meets or exceeds VIM/VAR specifications
  • Internal surface finish
    • 5500: ≤ 10 μin / 0.25 μm Ra
    • 5502: ≤ 0.7 μm Rmax

Removal Rating

  • ≥ 0.003 μm

Preconditioned Option1
(5502 Series)

  • < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
  • < 10 ppb thc contribution (Qualified per SEMASPEC test method #90120396B-STD)
  • < 10 ppb 02 contribution (Qualified per SEMASPEC test method #90120398B-STD)
  • No particle contribution above background ≤ 1 particle/(ft3 or m3)

Connections

  • 14 in. Gasket Seal Male/Male (VCR2 or compatible)
  • 14 in. Butt Weld Male/Male (0.035 in. / 0.89 mm wall)
  • 12 in. Gasket Seal Male/Male (VCR or compatible)
  • 12 in. Butt Weld (0.049 in. / 1.24 mm wall)

Operating Conditions

  • Maximum Operating Pressure:
    • 750 psig @ 100 °F/51.7 bar @ 38 °C
    • 550 psig @ 800 °F/38 bar @ 426 °Cfor inert gases only
  • Maximum Allowable Differential Pressure: 75 psid @ 68 °F/ 5.2 bar @ 20 °C

Particle Removal Characteristics

  • 109 particle reduction up to 150 slpm

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s
1 The 5500 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.
Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate
Type
Assemblies
Use
Filtration
Ordering Information
Part Number Description Fitting Type Length (L)
(in. / mm)
Preconditioned
GLFF5500VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 No
GLFF5500VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 No
GLFF5500BW4 All 316L Stainless Steel 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 2.50 / 64 No
GLFF5500BW8 All 316L Stainless Steel 12 in. Butt Weld, 0.049 in. / 1.24 mm wall 2.50 / 64 No
GLFF5502VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 Yes
GLFF5502VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 Yes
GLFF5502BW4 All 316L Stainless Steel 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 2.50 / 64 Yes
GLFF5502BW8 All 316L Stainless Steel 12 in. Butt Weld, 0.049 in. / 1.24 mm wall 2.50 / 64 Yes
SGLFF5500VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 No
SGLFF5500VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 No
SGLFF5502VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 Yes
SGLFF5502VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 Yes

Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration