Gaskleen® TM Filter Assemblies 1 1/2'' W-Seal product photo Primary L

Gaskleen® TM Filter Assemblies 1 1/2'' W-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.
  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
  • Available with a 14 in. VCR1 port on top of assembly for a pressure gauge or other component
  • Improved corrosion resistance using Pall's proprietary process
1 VCR is a registered trademark of Swagelok Company


* Required
Need Help?
Download Datasheet
Description
Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.
  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
  • Available with a 14 in. VCR1 port on top of assembly for a pressure gauge or other component
  • Improved corrosion resistance using Pall's proprietary process
1 VCR is a registered trademark of Swagelok Company
Specifications

Materials

  • Electropolished 316L stainless steel housing
  • Cr:Fe (1:1) chromium-enriched internal surface chemistry ≤ 0.7 μm Rmax internal surface finish

Removal Rating

  • ≥ 3 nm

Particle Removal Characteristics

  • 109 reduction at rated flow of 5 slpm
  • 106 reduction at rated flow of 15 slpm
  • 104 reduction at rated flow of 30 slpm

Connections

  • W-seal, 112 in. interface

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s

Operating Conditions

  • Maximum operating pressure: 0.97 MPa @ 40 °C / 140 psig @ 104 °F
  • Maximum allowable differential pressure: 0.69 MPa @ 40 °C / 100 psid @ 104 °F
Performance

Pressure Drop vs. Gas Flow Rate

F3200

F3200
Type
Filter Capsules
Additional Information

Dimensions

GTM-3200F4A

GTM-3200F4A

GTMF3200F4A-VM4

GTMF3200F4A-VM4
Ordering Information
Part Number Description1 Height (H)
(mm / in.)
Design Flow
Rate (slpm)
GTMF3200F4A All 316L stainless steel 42 / 1.65 0-30
GTMF3200F4A-VM4 All 316L stainless steel
14 in. VCR port
60 / 2.36 0-30
1 Please contact Pall Microelectronics for other configurations.
Application
Process gas filtration