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The Pall Ultipleat G2 SP DR filter is designed specifically for high flow and improved particle removal in critical surface preparation chemical baths such as HF and BOE. The SP DR filter features a highly asymmetrical membrane construction, developed using Pall’s proprietary membrane modeling technology (MMT) .
The pore size distribution of the membrane uniformly transitions from microporous to nanoporous throughout its depth. The result is a new, application-specific membrane morphology designed for deep submicron retention of particles down to 2 nanometers. This retention is achieved without the flow restriction limitations of conventional membrane pore structures.
The 2 nanometer, 5 nanometer and 10 nanometer Ultipleat G2 SP DR filter uses native polyarylsulfone with over 40% higher surface energy than typical surface modified non-dewet PTFE membranes.
The Ultipleat G2 SP DR KC assemblies are completely disposable filter units. They are ideally suited for the filtration of etchant, low temperature stripping chemicals, and DI water.
- MMT-enhanced dual retention of particles
- Superior HF filtration
- Higher flow rates and longer life
- Hyperfine microporous membrane matrix
- High surface energy membrane for minimized microbubble formation
- Faster tool qualification for reduced cost of ownership
- Prevent process contamination by using KC disposable assemblies
Specifications
Materials of Construction
Components | Materials |
Filter Medium | Polyarylsulfone |
Support and drainage | Polyethylene |
Core,cage and end caps | Polyethylene |
Sealing method | Melt seal |
Housing | PFA |
O-ring options | FEP encapsulated fluoroelastomer, FFKM |
* All fluoro-polymer materials made without PFOA
Product Name | Ultipleat G2 SP DR Filters | |||
Removal Ratings | 30 nm | 10 nm | 5 nm | 2 nm |
Media Wettability | Hydrophilic | Hydrophobic | ||
Filter Areas | 1.9 m2 / 20.6 ft2 | 1.4 m2 / 15.0 ft2 | ||
Maximum Operating Temperature | 70 °C / 158 °F | |||
Maximum Forward Differential Pressure | 0.1 MPa / 15 psid @ 70 °C / 158 °F | |||
Product Name | Ultipleat G2 SP DR KC Assemblies | ||||
Housing Material | PFA1 | HDPE | |||
Removal Ratings | 10 nm | 5 nm | 2 nm | 5 nm | 2 nm |
Media Wettability | Hydrophilic | Hydrophobic | |||
Filter Areas | 1.4 m2 / 15 ft2 | ||||
Flow | Inline | L-flow | T-flow | Inline | |
LDFGN1 | LDFDL1 | LDFDT1 | LDFGN1 | ||
Maximum Operating Temperature | 70 °C / 158 °F | 60 ºC / 140 ºF | |||
Maximum Operating Pressure | 0.49 MPaG / 70 psig @ 25 ºC / 77 ºF 0.34 MPaG / 50 psig @ 70 ºC / 158 ºF |
0.49 MPaG / 70 psig @ 25 ºC / 77 ºF 0.34 MPaG / 50 psig @ 60 ºC / 140 ºF |
|||
Maximum Forward Differential Pressure | 0.1 MPa / 15 psid @ 70 °C / 158 °F | 0.1 MPa / 15 psid @ 60 ºC / 140 ºF | |||
Dimensions (nominal)
Dimensions (nominal)
Performance
Typical Flow Characteristics – 1 cP fluid, 20 ºC
Type
Ordering Information
Part Numbers / Ordering Information4
Ultipleat G2 SP DR KC Assemblies (PFA Capsule)
LDF [1] 1[2] [3] E [4] [5]
Table 1
Code | Flow |
DT | T-flow |
DL | L-flow |
GN | Inline |
Table 2
Code | Removal Ratings |
HSAH | 2 nm |
HSSH | 5 nm |
HSVH | 10 nm |
Table 3
Code | Inlet/Outlet | Vent/Drain | Memo | |
Head end | Bowl end | |||
12 | 3/4" in male | 3/8" in male | 3/8" in male | Inline |
128 | 3/4" in male | 1/2" in male | 1/2" in male | T-flow / L-flow |
164 | 1" in male | 1/4" in male | 1/4" in male | Inline |
168 | 1" in male | 1/2" in male | 1/2" in male | T-flow |
17 | 1" in female | 1/2" in female | 1/2" in female | Inline |
Table 4
Code | Connections |
2 | Super Pillar Type (Nippon Pillar)2 |
51 | Flare style |
71 | Super Pillar 300 P series (Nippon Pillar)2 |
Table 5
Code | Prewet Option | Scope |
None | Dry | 30 nm only |
-K6 | Dry, Low metal extractables3 | 30 nm only |
-K13C | Prewet filter (packaged in DI water), Low metal extractables3 | 5 nm, 10 nm |
-K13D | Prewet filter (packaged in DI water), Low metal extractables3 | 2 nm |
Ultipleat G2 SP DR KC Assemblies (HDPE Capsule)
LDDGN1 [1] [2] E51 [3]
Table 1
Code | Removal Ratings |
HSAH | 2 nm |
HSSH | 5 nm |
Table 2
Code | Inlet/Outlet | Vent/Drain | Total Length | |
Head end | Bowl end | |||
124 | 3/4" in male | 1/4" in male | 1/4" in male | 360 mm (14.2 in) |
124L | 3/4" in male | 1/4" in male | 1/4" in male | 415 mm (16.3 in) |
164 | 1" in male | 1/4" in male | 1/4" in male | 370 mm (14.6 in) |
164L | 1" in male | 1/4" in male | 1/4" in male | 439 mm (17.3 in) |
Table 3
Code | Prewet Option | Scope |
None | Dry | Available |
-K3 | Prewet filter (packaged in DI water) | 5 nm, 10 nm |
-K6 | Dry, Low metal extractables3 | 30 nm |
-K13C | Prewet filter (packaged in DI water), Low metal extractables3 | 5 nm, 10 nm |
-K13D | Prewet filter (packaged in DI water), Low metal extractables3 | 2 nm |
Ultipleat G2 SP DR Filters
ABDG [1] [2] 3E [3] [4]
Table 1
Code | Length (Nominal) | |
Inch | mm | |
1 | 10 | 225 |
2 | 20 | 468 |
Table 2
Code | Removal Ratings |
HSAH | 2 nm |
HSSH | 5 nm |
HSVH | 10 nm |
HSQ | 30 nm |
Table 3
Code | O-ring Material |
H1 | FEP-encapsulated fluoroelastomer |
H38 | FFKM |
Table 4
Code | Prewet Option | Scope |
None | Dry | Available |
-K3 | Prewet filter (packaged in DI water) | 5 nm, 10 nm |
-K6 | Dry, Low metal extractables3 | 30 nm |
-K13C | Prewet filter (packaged in DI water), Low metal extractables3 | 2 nm, 5 nm, 10 nm |
-K13D | Prewet filter (packaged in DI water), Low metal extractables3 | 2 nm |
3 Please contact Pall for the extractable conditions
4 Not all code combinations have part numbers available. Please contact Pall for part number availability.
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