XpressKleen™ G2 filters & XpressKleen™ G2 KC Assemblies product photo Primary L

XpressKleen™ G2 filters & XpressKleen™ G2 KC Assemblies

The XpressKleen™ G2 filter advances PTFE membrane filtration to enable semiconductor makers to meet the critical chemical filtration requirements of leading edge device manufacturing processes. The XpressKleen filter provides control of critical size particles as well as maintaining critical fluid purity with a guarantee of less than 3 ppb of total metal ion extractables per single length filter1,2. The XpressKleen filter’s surface cleanliness includes removal of organic contamination and surface particles. This make the filter suitable for use from the point of supply (POS) to point of process (POP) to help define a contamination control system that delivers the required fluid purity to the wafer.

This is accomplished by Pall’s completely integrated manufacturing capability that extends from the PTFE resin to the finished filter device. Pall’s advanced manufacturing process (AMP), incorporates the latest clean room manufacturing and state-of-the-art proprietary cleaning steps with improved statistical process control to ensure reliability and performance.

The XpressKleen G2 filter medium is made using Pall’s proprietary Molecular Surface Tailoring (MST) technology. The nondewetting XpressKleen G2 filter is qualified for use in aggressive high temperature cleaning chemistries, including aqueous chemistries such as SC1 and SC2.

  • Low extractables ‹3 ppb total of 13 elements ‹0.1ppb(Ni), ‹0.2ppb(Cu)
  • >40nm particle rinse up control in UPW
  • TOC control
  • 100% prewetted shipment with ultrapure water package
  • High flow rates
  • G2 KC assembly available with downstream venting
  • Disposable filter unit with filter cartridge integrally sealed in housing
  • Sealed assembly for safer handling and faster changeout
  • 100% integrity tested

Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb. Consult factory for details.
XP10 nm has ≤ 1ppb of total metal ion concentration per single length filter.


* Required
Need Help?
Download Datasheet
Description

The XpressKleen™ G2 filter advances PTFE membrane filtration to enable semiconductor makers to meet the critical chemical filtration requirements of leading edge device manufacturing processes. The XpressKleen filter provides control of critical size particles as well as maintaining critical fluid purity with a guarantee of less than 3 ppb of total metal ion extractables per single length filter1,2. The XpressKleen filter’s surface cleanliness includes removal of organic contamination and surface particles. This make the filter suitable for use from the point of supply (POS) to point of process (POP) to help define a contamination control system that delivers the required fluid purity to the wafer.

This is accomplished by Pall’s completely integrated manufacturing capability that extends from the PTFE resin to the finished filter device. Pall’s advanced manufacturing process (AMP), incorporates the latest clean room manufacturing and state-of-the-art proprietary cleaning steps with improved statistical process control to ensure reliability and performance.

The XpressKleen G2 filter medium is made using Pall’s proprietary Molecular Surface Tailoring (MST) technology. The nondewetting XpressKleen G2 filter is qualified for use in aggressive high temperature cleaning chemistries, including aqueous chemistries such as SC1 and SC2.

  • Low extractables ‹3 ppb total of 13 elements ‹0.1ppb(Ni), ‹0.2ppb(Cu)
  • >40nm particle rinse up control in UPW
  • TOC control
  • 100% prewetted shipment with ultrapure water package
  • High flow rates
  • G2 KC assembly available with downstream venting
  • Disposable filter unit with filter cartridge integrally sealed in housing
  • Sealed assembly for safer handling and faster changeout
  • 100% integrity tested

Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb. Consult factory for details.
XP10 nm has ≤ 1ppb of total metal ion concentration per single length filter.
Specifications

Materials of Construction3

 
Parts Material
Filter medium Surface-modified PTFE
Media support PTFE / PFA
Core, cage and end caps PFA
Housing PFA
O-ring options4 FEP-encapsulated fluoroelastomer
 
All fluoro-polymer materials made without PFOA.
Consult factory for other options.

Removal Ratings and Operating Conditions

Kleen-Change® (KC)


 
Removal ratings 10nm 12nm 15nm 30nm
Media code XP10 XP12 XP15 XP15L XP30
Filter area 2.8m2 2.2m2 1.9m2 3m2 1.9m2
Flow Inline, L-flow, T-flow
Maximum operating temperature 180°C / 356°F
Maximum operating pressure 0.49 MPaG (71 psig) @ 25°C (77°F)
0.39 MPaG (56.6 psig) @ 60°C (140°F)
0.34 MPaG (49.3 psig) @ 90°C (194°F)
0.20 MPaG (29.0 psig) @ 120°C (248°F)
0.15 MPaG (21.8 psig) @ 150°C (302°F)
0.12 MPaG (17.4 psig) @ 180°C (356°F)
 

Cartridge

 
Removal ratings 10 nm 12nm 15nm 30nm
Media code XP10 XP12 XP15 XP15L XP30
Filter Area ABFG1 2.8m2 2.2m2 1.9m2 3m2 1.9m2
ABFG2 5.6m2 4.4m2 3.8m2 6m2 3.8m2
Maximum operating temperature 180°C / 356°F
Maximum operating pressure 0.59 MPaG (85.6 psig) @ 50°C (120°F)
 
Performance

Typical Flow Characteristics - 1cP fluid, 20℃



Type
Assemblies, Capsules, Cartridges and Elements
Ordering Information

XpressKleen G2 KC Assemblies
LDF [1] [2] 1XP [3] [4] E [5]



Table 1

 
Code Downstream vent
G N / A
V Available
 


Table 2

 
Code Flow
T T-flow
N In-line
L L-flow
 


Table 3

 
Code Removal rating
10 10 nm
12 12 nm
15 15 nm
15L 15 nm
30 30 nm
 


Table 4

 
Code >Inlet / Outlet Vent / Drain Type
Head End Bowl End
12 3⁄4 in (male) 1⁄2 in (male) 1⁄2 in (male) T-flow / L-flow
12 3⁄4 in (male) 1⁄2 in (male) 1⁄2 in (male) DV type
12 3⁄4 in (male) 3/8 in (male) 3/8 in (male) In-line
124 3⁄4 in (male) 1⁄4 in (male) 1⁄2 in (male) In-line
128 3⁄4 in (male) 1⁄2 in (male) 1⁄2 in (female) DV type
13 3⁄4 in (male) 1⁄2 in (female) 1⁄2 in (female) T-flow
16 1 in (male) 1⁄2 in (male) 1⁄2 in (male) T-flow
16 1 in (male) 1⁄2 in (male) 1⁄2 in (female) DV type
16 1 in (male) 3⁄8 in (male) 3⁄8 in (male) In-line
164 1 in (male) 1⁄4 in (male) 1⁄4 in (male) In-line
168 1 in (male) 1⁄2 in (male) 1⁄2 in (male) DV type
17 1 in (female) 1⁄2 in (female) 1⁄2 in (female) In-line
 

DV: Downstream Venting

Table 55

 
Code Connections
1 20 series Flowell6
2 Super Pillar type7
51 Flare style
6 FinalLock8
71 Super Pillar 300 P series
72 Super Pillar 300 P series L type
8 60 series Flowell
9 11CR series Flowell
 
5 Disposable capsules are not available with every option. (Refer to codesfor options.) Contact your local Pall representative for option availability.
6 Flowell is a trademark of Flowell Corporation.
7 Super Pillar is a trademark of Nippon Pillar Packing Co., Ltd.
8 FinalLock is a trademark of Kurabo Industries Ltd.


XpressKleen G2 Filter
ABFG [1] XP [2] 3E [3]


Table 1

 
Code Length Inch (Nominal mm)
1 10 225
2 20 468
 


Table 2

 
Code Removal rating
10 10 nm
12 12 nm
15 15 nm
15L 15 nm
30 30 nm
 


Table 3

 
Code O-ring material
H1 FEP-encapsulated fluoroelastomer
H11 Kalrez9
H35 Perfrez10
 
9 Kalrez is a trademark of DuPont Performance Elastomers
10 Perfrez is a trademark of Applied Seals North Americas
Application
Chemicals, Wet etch & cleans