Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product ID: 12684

Unit of Measure
9/EA
Min Order Qty
9

Product ID: AB01Y03018J

Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
3 µm
Effective Filtration Area (Metric cm²)
50 cm²
Format
1" filter cartridge
Material
Polypropylene

Product ID: AB04P00319JTIMMD

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB04P40018JTIMMD

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB1P00319JTIMONIUM

Unit of Measure
24/EA
Min Order Qty
24

Product ID: AB1P00519JTIMONIUM

Unit of Measure
24/EA
Min Order Qty
48

AB1P05018J product photo
Product ID: AB1P05018J

Unit of Measure
24/EA
Min Order Qty
24

Product ID: AB1PYN18J

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB1W00325J

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB1Y0053H1TIMONIUM

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB1Y0058JTIMONIUM

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB1Y0103H13TIMMD

Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets