Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Claris® Filter Cartridge, 3 µm, 10 in, Double Open Ended with No Endcaps

Product ID: CLR310W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Change Out Differential Pressure
2.4 bard
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R2F700

Product ID: R2F700TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

FILTER

Product ID: ABGN2FN0507H13
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 10 Inches

Product ID: RGN1FN400NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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RLS1FPS050

Product ID: RLS1FPS050
Unit of Measure
12/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT20010UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
200 micron

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F300
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA0530UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F010H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: NXT539UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron

Profile® II, Filter Cartridges, Polypropylene, Length 40 Inches, Timonium

Product ID: RM4F050H21TIMONIUM
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
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1,578 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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