Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

NA

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 50 inches

Product ID: CLR150
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
50 in
Cartridge Length (Metric)
1270 mm
Cartridge Length (Metric)
127 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: CLR1975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR130
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
1 micron

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.875 inches

Product ID: CLR19875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.25 inches

Product ID: CLR202925
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches

Product ID: CLR140
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
1 micron

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 19.5 inches

Product ID: CLR20195
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 39 inches

Product ID: CLR2039
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
NA
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This product is currently not available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.5 inches

Product ID: CLR20295
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches

Product ID: CLR2040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene

Product ID: CLR205
Unit of Measure
120/EA
Min Order Qty
120
Length
12.7 cm / 5 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: CLR2030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
20 micron
427 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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