Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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NXT 200-20U-H21 product photo

Nexis, NXT, 200 μm, 50.8 cm (20 in), DOE, Santoprene gasket seal

Product ID: NXT20020UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F020H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, Nitrile product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, Nitrile

Product ID: CLR130M3N
Unit of Measure
12/EA
Min Order Qty
12
NXT 0.5-10U-M7E product photo

Nexis, NXT, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT0510UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT2520UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F050TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F900H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: CLR120M3S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT540U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
5 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: CLR540M3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
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CRTG RM3FYNH21

Product ID: RM3FYNH21
Unit of Measure
24/EA
Min Order Qty
48

Discontinued

This part is no longer available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Nitrile

Product ID: CLR530M3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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1,400 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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