Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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AB4Y10018J

Product ID: AB4Y10018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y30018J

Product ID: AB4Y30018J
Unit of Measure
12/EA
Min Order Qty
12
CRTG AB4P00319J product photo

CRTG AB4P00319J

Product ID: AB4P00319J
Unit of Measure
24/EA
Min Order Qty
48

Discontinued

This part is no longer available. Please contact us for more information.

CRTG AB4Y0308J

Product ID: AB4Y0308J
Unit of Measure
12/EA
Min Order Qty
12
CTRG AB2 PROFILE C18 YNH product photo

CTRG AB2 PROFILE C18 YNH

Product ID: AB2YN18H
Unit of Measure
24/EA
Min Order Qty
24

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

Filter 20" Profile II 3µm

Product ID: AB2Y0303J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Filter 40" Profile II 0,5µm product photo

Filter 40" Profile II 0,5µm

Product ID: AB4Y0057J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Filter 40" Profile II 5µm

Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Filtro 1" Profile II 3µm product photo

Filtro 1" Profile II 3µm

Product ID: AB01Y03018J
Unit of Measure
3/EA
Min Order Qty
3
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Profile Code 19 20

Product ID: AB2P01019J
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridges, Polypropylene, Length 20 inches

Product ID: AB2Y0037PH4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

60 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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