Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Discontinued
Product ID: AB3Y20018H13
Unit of Measure
48/EA
Min Order Qty
48
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
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Discontinued
Product ID: AB3Y40018J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
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Product ID: AB4Y03018J
Unit of Measure
12/EA
Min Order Qty
12
Discontinued
AB4Y0057J product photo
Product ID: AB4Y0057J
Unit of Measure
1/EA
Min Order Qty
1
Product ID: AB4Y30018J
Unit of Measure
12/EA
Min Order Qty
12
Product ID: AB4Y10018J
Unit of Measure
1/EA
Min Order Qty
1
Product ID: AB4Y0308J
Unit of Measure
12/EA
Min Order Qty
12
Discontinued
Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1
Product ID: Y700FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
Product ID: AB2Y0303J
Unit of Measure
1/EA
Min Order Qty
1
Discontinued
Product ID: AB2Y0107H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
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47 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets