Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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5ESC10770-2ECJ-022

Product ID: 5ESC107702ECJ022
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5ESC10670-3U6-40ZJ-137

Product ID: 5ESC106703U6S00002
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5ESC10770-2U0045J-105 product photo

5ESC10770-2U0045J-105

Product ID: 5ESC107702U0S00002
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5ESC10670-3U6-40ZJ-154 product photo

5ESC10670-3U6-40ZJ-154

Product ID: 5ESC106703U6S00001
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5ESC10770-2U010ZJ-105

Product ID: 5ESC107702U0S00001
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5ESC10770-2ECH13-007 product photo

5ESC10770-2ECH13-007

Product ID: 5ESC107702ECH13007
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5ESC10670-3U001ZJ-154 product photo

5ESC10670-3U001ZJ-154

Product ID: 5ESC106703U0S00001
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5ESC10770-2U010ZJ-007

Product ID: 5ESC107702U0S00003
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5ESC10770-2U010ZJ-022

Product ID: 5ESC107702U0S00005
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5ESC10670-3U001ZJ-137 product photo

5ESC10670-3U001ZJ-137

Product ID: 5ESC106703U0S00003
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1/EA
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1

5ESC10770-2EGJ-007

Product ID: 5ESC107702EGJ007
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1/EA
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1

5ESC10770-2U0045J-044

Product ID: 5ESC107702U0S00008
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1,510 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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