Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Profile® II Filter Cartridge

Product ID: ME3310FPN40H
Unit of Measure
12/EA
Min Order Qty
12

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 Inches

Product ID: ARD4020USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.

Y010GS10

Product ID: Y010GS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CMC15748

Product ID: CMC15748
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA140U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps)

Product ID: NXT120975U729
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 5 inches

Product ID: NXT1005U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA3020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches

Product ID: NXT301625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal

Product ID: NXT309875UH21
Unit of Measure
60/EA
Min Order Qty
60

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT5010UDOES
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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30" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP30Z
Unit of Measure
12/EA
Min Order Qty
12
1,507 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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