Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 30 Inches

Product ID: RGN3FN400
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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ME3310CPR40H 132

Product ID: ME3310CPR40H132
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: RM3F200H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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CTRG PROFILE PIH AB C4 30" 120

Product ID: HC3310FPS30H
Unit of Measure
24/EA
Min Order Qty
24

Y200GS10

Product ID: Y200GS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3Y0057H4
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
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RF-Style 1" Profile II 40µm

Product ID: R01F400
Unit of Measure
6/EA
Min Order Qty
6

10µm, 20", DOE w/seal

Product ID: MCY1002A100J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F400H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
40 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN30Z
Unit of Measure
1/EA
Min Order Qty
1

CTRG ABGN1 PROFILE C18 N050H

Product ID: ABGN1N05018H
Unit of Measure
12/EA
Min Order Qty
12

WF4P00318J

Product ID: WF4P00318JTIMONIUM
Unit of Measure
12/EA
Min Order Qty
12
595 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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