Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Claris®

Industries

Microelectronics

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

CLR 30-10 product photo

30um, 10", DOE

Product ID: CLR3010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
30 micron

CLR 50-29.5

Product ID: CLR50295
Unit of Measure
1/EA
Min Order Qty
1

CLR 30-40-M3HE

Product ID: CLR3040M3HE
Unit of Measure
24/EA
Min Order Qty
24
Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron
Claris, Polypropylene, 1 micron, 29.5 inch product photo

Claris, Polypropylene, 1 micron, 29.5 inch

Product ID: CLR1295
Unit of Measure
12/EA
Min Order Qty
12
Length
74.9 cm / 29.5 in
Micron
1 micron
Claris, Polypropylene, 50 micron, 9.75 inch product photo

Claris, Polypropylene, 50 micron, 9.75 inch

Product ID: CLR50975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
50 micron

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: CLR120H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris, Polypropylene, 10 micron, 9.75 inch product photo

Claris, Polypropylene, 10 micron, 9.75 inch

Product ID: CLR10975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
10 micron
Claris, Polypropylene, 75 micron, 10 inch product photo

75um, 10", DOE

Product ID: CLR7510
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
75 micron

CLR 50-30-M3E

Product ID: CLR5030M3E
Unit of Measure
12/EA
Min Order Qty
12
Claris, Polypropylene, 5 micron, 29.5 inch product photo

Claris, Polypropylene, 5 micron, 29.5 inch

Product ID: CLR5295
Unit of Measure
12/EA
Min Order Qty
12
Length
74.9 cm / 29.5 in
Micron
5 micron

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM

Product ID: CLR130M7E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
See All Attributes
26 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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