Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

DFT Classic®

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Cartridge Length (Metric)

1016 mm

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 40 Inches, Polypropylene

Product ID: F010AW40U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: RT005AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: C001AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 304 stainless steel, with Core Cover

Product ID: C005AW40AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene, Bulk packaging

Product ID: C010AW40U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: U005AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Individually wrapped

Product ID: U005AW40U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Length 40 Inches, Polypropylene

Product ID: U020AW40UEM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 40 Inches, Polypropylene

Product ID: U025AW40U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 2 μm, Length 40 Inches, 304 stainless steel

Product ID: C002AW40ACEC1A
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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