Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

DFT Classic®

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel, with Core Cover

Product ID: C001AW20AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Discontinued

This part is no longer available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, 304 stainless steel, Bulk packaging

Product ID: C005AW195A
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, 316 stainless steel, with Extended Core, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, 316 stainless steel, with Extended Core, Bulk packaging

Product ID: U010AW195SEC1S
Unit of Measure
10/EA
Min Order Qty
10
FILTER CANISTER LOWER MAINTENANCE ROOM product photo

FILTER CANISTER LOWER MAINTENANCE ROOM

Product ID: CC17074E02S
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CC13377C08

Product ID: CC13377C08
Unit of Measure
1/EA
Min Order Qty
1

CC60336C00

Product ID: CC60336C00
Unit of Measure
1/EA
Min Order Qty
1
CC55045C00 product photo

CC55045C00

Product ID: CC55045C00
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 304 stainless steel

Product ID: C001AW30A
Unit of Measure
1/EA
Min Order Qty
1

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Individually wrapped

Product ID: U001AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

CC36900D00

Product ID: CC36900D00
Unit of Measure
1/EA
Min Order Qty
1

CC13826C00

Product ID: CC13826C00
Unit of Measure
1/EA
Min Order Qty
1

CC28665C00

Product ID: CC28665C00
Unit of Measure
1/EA
Min Order Qty
1
42 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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