Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C100AW40S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
100 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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PO847SOL

Product ID: PO847SOL
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

RHODIADF330M3 177

Product ID: RHODIADF330M3177
Unit of Measure
1/EA
Min Order Qty
1

RHODIADF330DOE 177

Product ID: RHODIADF330DOE177
Unit of Measure
1/EA
Min Order Qty
1

MPDF 1-30VUU

Product ID: MPDF130VUU
Unit of Measure
1/EA
Min Order Qty
1
MPDF 0.2-40VEE product photo

MPDF 0.2-40VEE

Product ID: MPDF0240VEE
Unit of Measure
1/EA
Min Order Qty
1

MPDF 1-40VEE

Product ID: MPDF140VEE
Unit of Measure
1/EA
Min Order Qty
1

GF010Z40UEM7

Product ID: GF010Z40UEM7
Unit of Measure
1/EA
Min Order Qty
1

GP 0.45-10U-X4N 246

Product ID: GP04510UX4N246
Unit of Measure
1/EA
Min Order Qty
1
GP 0.2-30A-X4V 246 product photo

GP 0.2-30A-X4V 246

Product ID: GP0230AX4V246
Unit of Measure
1/EA
Min Order Qty
1

GP 10-20A-X4V 246

Product ID: GP1020AX4V246
Unit of Measure
1/EA
Min Order Qty
1

GP 1-4U-X3S 246

Product ID: GP14UX3S246
Unit of Measure
1/EA
Min Order Qty
1
201 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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