Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

Availability

In Stock

Duo-Fine®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT140EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT310EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFPT330ENM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, FluorocarbonElastomer

Product ID: DFPT320EV
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, SOE fin end, external 222 O-rings

Product ID: DFPT330EFM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches

Product ID: DFPT340EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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GP 3-30A-X4N 246

Product ID: GP330AX4N246
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

GP 10-20A-X4V 246

Product ID: GP1020AX4V246
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

GP 1-4U-X3S 246

Product ID: GP14UX3S246
Unit of Measure
1/EA
Min Order Qty
1

GP 30-10U-X4N 246

Product ID: GP3010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

GP 50-10U-X4N 246

Product ID: GP5010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, DOE with elastomer gasket seals & end caps

Product ID: DFN0210UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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88 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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