Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

Availability

In Stock

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm

Product ID: DFN0451401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Packaging Type
Standard packaging

Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN045295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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Duo-Fine® , Filter Cartridges, Removal Rating 30 μm

Product ID: DFN301401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Packaging Type
Standard packaging

Duo-Fine® , Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN3030AN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
DOE, 2.54 cm (1 in) extended core
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm

Product ID: DFN31401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Packaging Type
Standard packaging

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0210UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0230USM7B334
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M7
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Duo-Fine® II, Filter Cartridges, Removal Rating 30 μm, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: DFNT3010UVM8
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M8
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Duo-Fine® , Filter Cartridges, Removal Rating 30 μm, Length 10 Inches

Product ID: DFNT3010UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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DFNT-INEOS-10 121

Product ID: DFNTINEOS10121
Unit of Measure
12/EA
Min Order Qty
12

Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT0230EVM3562
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches

Product ID: DFPT04520EFM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
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92 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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