Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Epocel®

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

ELEMENT 2 3/4" U010Z 1 MICRON product photo

ELEMENT 2 3/4" U010Z 1 MICRON

Product ID: CN05870C08
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

5ESC10670-1EEJ-011 D product photo

5ESC10670-1EEJ-011 D

Product ID: 5ESC106701EEJ011D
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-2ECH4-076 product photo

5ESC10670-2ECH4-076

Product ID: 5ESC106702ECH4076
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-2ECH13-007 product photo

5ESC10770-2ECH13-007

Product ID: 5ESC107702ECH13007
Unit of Measure
1/EA
Min Order Qty
1
5ESC11070-2ECJ-038 product photo

5ESC11070-2ECJ-038

Product ID: 5ESC110702ECJ038
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 6" EPOCEL EG 25 MICRON product photo

ELEMENT 6" EPOCEL EG 25 MICRON

Product ID: CA41078D02
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 6" EPOCEL EC 5 MICRON product photo

ELEMENT 6" EPOCEL EC 5 MICRON

Product ID: CA41078D01
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 2 3/4" EPOCEL EC 5 MICRON product photo

ELEMENT 2 3/4" EPOCEL EC 5 MICRON

Product ID: CA41079D01
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 12" EPOCEL EG 25 MICRON product photo

ELEMENT 12" EPOCEL EG 25 MICRON

Product ID: CA41083D02
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 8" EPOCEL EG 25 MICRON product photo

ELEMENT 8" EPOCEL EG 25 MICRON

Product ID: CA41077D02
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 12" EPOCEL EC 5 MICRON product photo

ELEMENT 12" EPOCEL EC 5 MICRON

Product ID: CA41083D01
Unit of Measure
1/EA
Min Order Qty
1

MCC1401E100H1-316L

Product ID: MCC1401E100H1316L
Unit of Measure
6/EA
Min Order Qty
6
52 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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