Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

HDC®

PUY1J025H

Product ID: PUY1J025H
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

CRTG PUY1J045J

Product ID: PUY1J045J
Unit of Measure
24/EA
Min Order Qty
24

CRTG PUY1J012J

Product ID: PUY1J012J
Unit of Measure
24/EA
Min Order Qty
24

CRTG PUY1J100H4

Product ID: PUY1J100H4
Unit of Measure
24/EA
Min Order Qty
24

CRTG, PUY2J012H13

Product ID: PUY2J012H13
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

CRTG PUY2J025J

Product ID: PUY2J025J
Unit of Measure
24/EA
Min Order Qty
24
CRTG PUY2J100Y1 product photo

CRTG PUY2J100Y1

Product ID: PUY2J100Y1
Unit of Measure
1/EA
Min Order Qty
1

CRTG, PUY2J060J

Product ID: PUY2J060J
Unit of Measure
24/EA
Min Order Qty
24

CRTG PUY4J006Y1

Product ID: PUY4J006Y1
Unit of Measure
12/EA
Min Order Qty
12

Profile® Nylon, Filter Cartridges, Removal Rating 30 μm, Nylon, Length 10 Inches

Product ID: RGN1F300AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 7 μm, Nylon, Length 20 Inches

Product ID: RGN2F070AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
7 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Filter 10" HDC II 0.6µm

Product ID: MCY1001J006H13
Unit of Measure
24/EA
Min Order Qty
24
140 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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