Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

HDC®

Product Type

Filter Cartridges

FILTER CART

Product ID: AB4J0127H
Unit of Measure
1/EA
Min Order Qty
1

Filter 40" HDC II 10µm

Product ID: AB4J1007H4
Unit of Measure
1/EA
Min Order Qty
1
AKPS30K product photo

CTRG JNR HDC II J100 2230 (NO O RING)

Product ID: AKPS30K
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Discs HDC J060 037 50/pk

Product ID: J060037050A
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 1.2µm

Product ID: MCY1001J012H13
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 0.6µm

Product ID: MCY1001J006H13
Unit of Measure
24/EA
Min Order Qty
24

MCY1001J045H2

Product ID: MCY1001J045H2
Unit of Measure
24/EA
Min Order Qty
24
Filter 10" HDC II 1.2µm product photo

Filter 10" HDC II 1.2µm

Product ID: MCY1001J012H4
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 6µm

Product ID: MCY1001J060H13
Unit of Measure
1/EA
Min Order Qty
1
CRTG MCY1001J025H13 product photo

CRTG MCY1001J025H13

Product ID: MCY1001J025H13
Unit of Measure
24/EA
Min Order Qty
24

This product is currently not available. Please contact us for more information.

Filter 10" HDC II 6µm

Product ID: MCY1001J060J
Unit of Measure
24/EA
Min Order Qty
24
Filter 10" HDC II 10µm product photo

Filter 10" HDC II 10µm

Product ID: MCY1001J100H
Unit of Measure
1/EA
Min Order Qty
1
112 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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