Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

HDC®

Availability

In Stock

Filter 10" HDC II 1.2µm

Product ID: AB1J0127J
Unit of Measure
6/EA
Min Order Qty
6
Filter 10" HDC II 4.5µm product photo

Filter 10" HDC II 4.5µm

Product ID: AB1J0457H4
Unit of Measure
6/EA
Min Order Qty
6

Filter 10" HDC II 6µm

Product ID: AB1J0607H4
Unit of Measure
1/EA
Min Order Qty
1

CRTG AB1J100-8H4

Product ID: AB1J1008H4
Unit of Measure
6/EA
Min Order Qty
6

Filter 10" HDC II 10µm

Product ID: AB1J1007J
Unit of Measure
6/EA
Min Order Qty
6

Filter 10" HDC II 6µm

Product ID: AB1J0607J
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 20µm

Product ID: AB1J2007H4
Unit of Measure
6/EA
Min Order Qty
6

HDC® II, Filter Cartridges, Removal Rating 4.5 μm, Length 30 Inches, silicone

Product ID: AB3J0457H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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FILTER CART

Product ID: AB4J0127H
Unit of Measure
1/EA
Min Order Qty
1

DFA3001J100

Product ID: DFA3001J100
Unit of Measure
6/EA
Min Order Qty
6

CRTG DFA4201J100

Product ID: DFA4201J100
Unit of Measure
6/EA
Min Order Qty
6

CRTG DFA4201J200

Product ID: DFA4201J200
Unit of Measure
6/EA
Min Order Qty
6
41 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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