Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

HDC®

Junior Filter HDC II 1.2µm

Product ID: MCY4463J012J
Unit of Measure
12/EA
Min Order Qty
12

Junior Filter HDC II 40µm

Product ID: MCY4463J400H4
Unit of Measure
12/EA
Min Order Qty
12

Junior Filter HDC II 4.5µm

Product ID: MCY4463J045J
Unit of Measure
12/EA
Min Order Qty
12

HDC® II Filter Cartridges, Removal Rating 20 μm, Length 20 inches

Product ID: AB2J2007J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Ethylene Propylene
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
CRTG DFA4201J060 product photo

CRTG DFA4201J060

Product ID: DFA4201J060
Unit of Measure
6/EA
Min Order Qty
6
MCY1002J012J product photo

Filter 20" HDC II 1.2µm

Product ID: MCY1002J012J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG MDY1003J400J

Product ID: MDY1003J400J
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

AB1J100-7H1

Product ID: AB1J1007H1
Unit of Measure
1/EA
Min Order Qty
1

Profile® Nylon, Filter Cartridges, Removal Rating 7 μm, Nylon, Length 20 Inches

Product ID: RGN2F070AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
7 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Filter 10" HDC II 10µm

Product ID: AB1J1003H4
Unit of Measure
6/EA
Min Order Qty
6

MCY1001Y050H13

Product ID: MCY1001Y050H13
Unit of Measure
12/EA
Min Order Qty
12
AB05J0452H4 product photo

AB05J0452H4

Product ID: AB05J0452H4
Unit of Measure
1/EA
Min Order Qty
1
110 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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