Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

HDC®

Availability

In Stock

Junior Filter HDC II 40µm

Product ID: MCY4463J400H4
Unit of Measure
12/EA
Min Order Qty
12

SLK7002J400

Product ID: SLK7002J400
Unit of Measure
6/EA
Min Order Qty
6

Junior Filter HDC II 4.5µm

Product ID: MCY4463J045J
Unit of Measure
12/EA
Min Order Qty
12
CRTG DFA4201J060 product photo

CRTG DFA4201J060

Product ID: DFA4201J060
Unit of Measure
6/EA
Min Order Qty
6

Filter 10" HDC II 20µm

Product ID: MCY1001J200H13
Unit of Measure
1/EA
Min Order Qty
1

Filter 40" HDC II 10µm

Product ID: AB4J1007H4
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 6µm

Product ID: AB1J0607J
Unit of Measure
1/EA
Min Order Qty
1
MDY1002J012H13 product photo

MDY1002J012H13

Product ID: MDY1002J012H13
Unit of Measure
1/EA
Min Order Qty
1

CRTG, PUY2J060J

Product ID: PUY2J060J
Unit of Measure
24/EA
Min Order Qty
24

HDC® II, Filter Cartridges, Removal Rating 4.5 μm, Length 30 Inches, silicone

Product ID: AB3J0457H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

HDC® II Filter Cartridge

Product ID: MDY2230J060J
Unit of Measure
1/EA
Min Order Qty
1

Junior Filter HDC II 4.5µm

Product ID: MCY4463J045H
Unit of Measure
1/EA
Min Order Qty
1
44 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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