Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene

Product ID: NXT100295U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
100 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
End Configuration
BLANK - DOE industrial (no end caps)
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT10030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches

Product ID: NXT10040U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 30 inches

Product ID: NXT10030U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10040UM18N
Unit of Measure
24/EA
Min Order Qty
24
Micron
100 micron
NXT 100-30U-M7E product photo

Nexis, NXT, 100 μm, 76.2 cm (30 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT10030UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1002725UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 5 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT1005UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches

Product ID: NXT1009875U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT10040U1X
Unit of Measure
12/EA
Min Order Qty
12

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal

Product ID: NXT1009875UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Nitrile, DOE with elastomer gasket seals and end caps

Product ID: NXT1010UDOEN
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.
812 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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