Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

HGD-U005AW50U-M8-N-R

Product ID: HGDU005AW50UM8NR
Unit of Measure
72/EA
Min Order Qty
72

KMT 10106722 139

Product ID: KMT10106722139
Unit of Measure
30/EA
Min Order Qty
30

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

A005621249

Product ID: A005621249
Unit of Measure
10/EA
Min Order Qty
10

A-00562-2 249

Product ID: A005622249
Unit of Measure
10/EA
Min Order Qty
10

A1449249

Product ID: A1449249
Unit of Measure
30/EA
Min Order Qty
30

A-1555 249

Product ID: A1555249
Unit of Measure
30/EA
Min Order Qty
30

A-9935 249

Product ID: A9935249
Unit of Measure
10/EA
Min Order Qty
10

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXA1020UDOES
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXA1030UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: NXA120UM7V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches

Product ID: NXAQ320UM8F12
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Type
NXAQ
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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832 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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