Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Industries

Microelectronics

Gasket / O-Ring Material

NA

Product Use

Pre-Filtration

Filter Media

Polypropylene

NXT 150-20U product photo

Nexis, NXT, 150 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT15020U
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
NXT 75-30U product photo

Nexis, NXT, 75 μm, 76.2 cm (30 in), DOE industrial (no end caps)

Product ID: NXT7530U
Unit of Measure
1/EA
Min Order Qty
1
Micron
75 micron
NXT 0.5-20U product photo

Nexis, NXT, 0.5 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT0520U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
0.5 micron
NXT 150-9.75U-H21 product photo

Nexis, NXT, 150 μm, 24.8 cm (9.75 in), DOE, Santoprene gasket seal

Product ID: NXT150975UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
NXT 1-4U product photo

Nexis, NXT, 1 μm, 10.2 cm (4 in), DOE industrial (no end caps)

Product ID: NXT14U
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
NXT 15-20U product photo

Nexis, NXT, 15 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT1520U
Unit of Measure
1/EA
Min Order Qty
1
Micron
15 micron
NXT 200-20U-H21 product photo

Nexis, NXT, 200 μm, 50.8 cm (20 in), DOE, Santoprene gasket seal

Product ID: NXT20020UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
NXT 5-10U-H21 product photo

Nexis, NXT, 5 μm, 25.4 cm (10 in), DOE, Santoprene gasket seal

Product ID: NXT510UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
8 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English