Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Industries

Oil & Gas

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings

Product ID: NXT20030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 4 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT2004UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT2010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches

Product ID: NXT2001625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches

Product ID: NXT20030U
Unit of Measure
20/EA
Min Order Qty
20
Micron
200 micron

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, DOE 2.54 cm (1 in) extended core

Product ID: NXT2040N1XW865
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
End Configuration Code
1X
End Configuration
1X - DOE, 2.54 cm (1 in) extended core
Cartridge Type
NXT
Change Out Differential Pressure
2.4 bard
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Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 19.5 inches

Product ID: NXT25195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches

Product ID: NXT205U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches

Product ID: NXT30195U
Unit of Measure
10/EA
Min Order Qty
10
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT2530U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches

Product ID: NXT3010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT320UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
163 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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