Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Product Type

Filter Cartridges

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 226 O-rings

Product ID: NXA510UM7E
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer

Product ID: NXA510UM7V
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA520UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA520UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA520UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA520UM7F
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA520UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches

Product ID: NXA52925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer

Product ID: NXA520UM8V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA530UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA530UM3S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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554 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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