Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Product Type

Filter Cartridges

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 29.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 29.25 inches

Product ID: NXT402925U
Unit of Measure
10/EA
Min Order Qty
10

Discontinued

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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT50195UH21
Unit of Measure
10/EA
Min Order Qty
10

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT520UM3N
Unit of Measure
1/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT52925U1X
Unit of Measure
12/EA
Min Order Qty
12

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT530UDOES
Unit of Measure
1/BOX
Min Order Qty
1

Discontinued

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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: NXT530USI
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals and end caps

Product ID: NXT540UDOEN
Unit of Measure
1/EA
Min Order Qty
12

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT7510UDOEE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT7540U1X
Unit of Measure
12/EA
Min Order Qty
12

Discontinued

This part is no longer available. Please contact us for more information.

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 4 inches

Product ID: NXA054UM3S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA110UM7S
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes
832 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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