Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Industries

Oil & Gas

Product Type

Filter Cartridges

Product Use

Pre-Filtration

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches

Product ID: NXT1010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT1010UM7S
Unit of Measure
24/EA
Min Order Qty
24
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT1020UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT1020UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1030UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT1030UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings

Product ID: NXT1030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXT1040UH21
Unit of Measure
20/EA
Min Order Qty
20
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches

Product ID: NXT1040U
Unit of Measure
10/EA
Min Order Qty
10
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXT1040UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: NXT110U
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
130 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English