Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

PhaseSep®

LCMEH

Product ID: LCMEH
Unit of Measure
1/EA
Min Order Qty
1

PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2H1AH316
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm

PhaseSep L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level

Product ID: LCS06H1HH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

PhaseSep EL L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2ELPH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2H2HH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level, 14µm Beta 5000 solids removal rating

Product ID: LCS2H1AH1
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

PhaseSep AS L/L Coalescer - PPS Depth - 20" - Fine Removal Rating

Product ID: LCS2FPS100966
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm

This product is currently not available. Please contact us for more information.

PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2H2HH1
Unit of Measure
4/EA
Min Order Qty
4
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

PhaseSep AS L/L Coalescer - PPS Depth - 40" - Fine Removal Rating

Product ID: LCS4FPS100966
Unit of Measure
12/EA
Min Order Qty
12
Maximum Operating Temperature (F)
250 °F
Maximum Operating Temperature (C)
121 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
2.07 bar
Maximum differential pressure rating (psid)
30 psid
See All Attributes

This product is currently not available. Please contact us for more information.

PhaseSep EL - LCS4ELPHCV product photo

PhaseSep EL L/L Coalescer, 40in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS4ELPHCV
Unit of Measure
1/EA
Min Order Qty
1

PhaseSep L/L Coalescer, 40in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS4H1AH11
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

PhaseSep AS L/L Coalescer - PPS Depth - 40" - Medium Removal Rating

Product ID: LCS4FPS200966
Unit of Measure
12/EA
Min Order Qty
12
Maximum Operating Temperature (F)
250 °F
Maximum Operating Temperature (C)
121 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
2.07 bar
Maximum differential pressure rating (psid)
30 psid
See All Attributes

This product is currently not available. Please contact us for more information.

19 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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