Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Poly-Fine®

DPFT 50-40EV 668

Product ID: DPFT5040EV668
Unit of Measure
1/EA
Min Order Qty
1

Profile® UP Filter Cartridges, Removal Rating 10 μm, Length 20 inches, Ethylene Propylene

Product ID: AB2UY10018J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Ethylene Propylene
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® UP Filter Cartridges, Removal Rating 50 μm, Length 20 inches

Product ID: AB2UY5007H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
50 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Profile® UP Filter Cartridges, Removal Rating 70 μm, Length 20 inches

Product ID: AB2UY7007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® UP, Filter Cartridges, Removal Rating 6 μm, Length 30 Inches

Product ID: AB3UY0607J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
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Profile® UP, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, FluorocarbonElastomer

Product ID: AB3UY1007H
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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AB4UY04518H1 product photo

AB4UY04518H1

Product ID: AB4UY04518H1
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: ARD1010UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 Inches

Product ID: ARD0530USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD1010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches

Product ID: ARD1010UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 Inches, EPDM

Product ID: ARD0520UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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731 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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