Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Poly-Fine®

Product Sub Type

Pleated Depth Filters

Cartridge Length (Imperial)

20 in

Product Type

Filter Cartridges

Filter Media

Polypropylene

Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, DOE industrial

Product ID: XLD2020UT
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Expanded PTFE (gaskets) FEP encapsulated silicone (O-rings)
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD320USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, EPDM, DOE industrial

Product ID: XLD1520UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE fin end external 226 O-rings

Product ID: XLD320UFM7B229
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: XLD4020UNM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 4.5 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD4520UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Poly-Fine® XLD Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 20 inches, EPDM, DOE industrial

Product ID: XLD7020UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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This product is currently not available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, DOE industrial

Product ID: XLD1020US
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, EPDM, SOE fin end external 226 O-rings

Product ID: XLD1020UEM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 20 inches, EPDM, DOE industrial

Product ID: XLD120UE
Unit of Measure
60/EA
Min Order Qty
60
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
End Configuration Code
Blank
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Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, Nitrile, DOE industrial

Product ID: XLD1520UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD1020USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
22 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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