Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Poly-Fine®

Product Type

Filter Cartridges

Gasket / O-Ring Material

Silicone

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, silicone, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: PFT10010USM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT10020USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT10030USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT10010USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial, No Bubble Test

Product ID: PFT1010US
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial

Product ID: PFT1010US425
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, Standard packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, Standard packaging

Product ID: PFT1010USM7425
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT1010USM7712
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT1010USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFT1010USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT1020USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial

Product ID: PFT1020US
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
193 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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