Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Poly-Fine®

Gasket / O-Ring Material

Silicone Elastomer

PFT 3-29.25US 263 product photo

PFT 3-29.25US 263

Product ID: PFT32925US263
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT02510USM8W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM8W480

Product ID: PFT02510USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
PFT 0.25-30US-M3W 480 product photo

PFT02530USM3W480

Product ID: PFT02530USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02530USM7W480

Product ID: PFT02530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings

Product ID: PFT02540USM8W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02540USM7W480

Product ID: PFT02540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT04510USM3W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM3W480

Product ID: PFT04510USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04540USM7W480

Product ID: PFT04540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.45 µm
PFT 0.45-40US-M8W 480 product photo

PFT 0.45-40US-M8W 480

Product ID: PFT04540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04530USM7W480

Product ID: PFT04530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.8-10US-M3W 480 product photo

PFT0810USM3W480

Product ID: PFT0810USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Discontinued

This part is no longer available. Please contact us for more information.
35 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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