Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Poly-Fine®

Cartridge Length (Imperial)

30 in

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, Nitrile, DOE industrial

Product ID: XLD330UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® II Filter Cartridges, Removal Rating 1 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT010300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Poly-Fine® II Filter Cartridge, PFT0830UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT0830UESIW480

Product ID: PFT0830UESIW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
Poly-Fine® II Filter Cartridge, PFT02530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT02530UESIW480

Product ID: PFT02530UESIW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT530USM7W480

Product ID: PFT530USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm

Profile® UP, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, FluorocarbonElastomer

Product ID: AB3UY1007H
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II Filter Cartridge, PFT02530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02530USM7W480

Product ID: PFT02530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT530UVM8
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® II Filter Cartridges, Removal Rating 10 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT100300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
See All Attributes

Profile® UP, Filter Cartridges, Removal Rating 6 μm, Length 30 Inches

Product ID: AB3UY0607J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: ARD130UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II Filter Cartridge, PFT0830UEM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0830UEM7W480

Product ID: PFT0830UEM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
36 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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