Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Y010FS10

Product ID: Y010FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y010GS10

Product ID: Y010GS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y003FS10

Product ID: Y003FS10TIMONIUM
Unit of Measure
12/EA
Min Order Qty
12

Y100FS10

Product ID: Y100FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y200FS10

Product ID: Y200FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y050GS30

Product ID: Y050GS30TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Y200GS10

Product ID: Y200GS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Y700FS10

Product ID: Y700FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CMC15748

Product ID: CMC15748
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F700
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F100
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2F100
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

579 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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