Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

5µm, 10", DOE w/seal

Product ID: MCY1001A050J
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" Profile Star 5µm

Product ID: MCY1001A050H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

MCY1001Y400H13

Product ID: MCY1001Y400H13
Unit of Measure
24/EA
Min Order Qty
24

1.5µm, 20", DOE w/seal

Product ID: MCY1002A015J
Unit of Measure
1/EA
Min Order Qty
1

10µm, 20", DOE w/seal

Product ID: MCY1002A100J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

40µm, 20", DOE w/seal

Product ID: MCY1002A400J
Unit of Measure
1/EA
Min Order Qty
1

20µm, 20", DOE w/seal

Product ID: MCY1002A200J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Filter 30" Profile Star 10µm

Product ID: MCY1003A100J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CTRG MCY PRFL STAR A010 J 1003

Product ID: MCY1003A010J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

620 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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