Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

NPL CTRG AB2 PROFILE NYLON 050 C7 H4

Product ID: ABGN2FN0507H4NPL
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: AB3Y40018H
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F070H21
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
7 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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ME3310FPY13H 132

Product ID: ME3310FPY13H132
Unit of Measure
24/EA
Min Order Qty
24

RLS2FPS100

Product ID: RLS2FPS100
Unit of Measure
12/EA
Min Order Qty
12

Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon

Product ID: RGN29FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F050H21TIMMD
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2F700
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2FYM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

HC3310FPN20H

Product ID: HC3310FPN20H
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F010H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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This product is currently not available. Please contact us for more information.

Filter 10" Profile Star 20µm

Product ID: AB1A2007H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

414 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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